Direct Maskess Aligner und Laserlithographiegeräte Referenznummer der Bekanntmachung: WSI/2022-E24/2
Berichtigung
Bekanntmachung über Änderungen oder zusätzliche Angaben
Lieferauftrag
(Supplement zum Amtsblatt der Europäischen Union, 2022/S 199-562233)
Abschnitt I: Öffentlicher Auftraggeber/Auftraggeber
Nationale Identifikationsnummer: DE811193231
Postanschrift:[gelöscht]
Ort: Garching
NUTS-Code: DE212 München, Kreisfreie Stadt
Postleitzahl: 85748
Land: Deutschland
Kontaktstelle(n):[gelöscht]
E-Mail: [gelöscht]
Telefon: [gelöscht]
Internet-Adresse(n):
Hauptadresse: www.wsi.tum.de
Adresse des Beschafferprofils: www.wsi.tum.de
Abschnitt II: Gegenstand
Direct Maskess Aligner und Laserlithographiegeräte
Direct Maskess Aligner and Laser Lithoghraphy tools to be installed in the laboratories of the Technical University of Munich. A translation of the entire document into German language is available on request.
The desktop and stand-alone maskless laser writers shall be used for contact-free lithography on hybrid (superconducting and semiconducting) quantum circuits and devices, nanofabrication without the need for conventional lithography masks and avoiding all physical contact with delicate quantum devices. Hereby, two instruments that will be used in tandem are required: (i) a table-top system that will be used in combination with a thermolithography system for rapid prototyping and quantum device imaging and repair and provide a resolution of ~1µm and (ii) a stand-alone system that can be used for higher resolution (<0.8µm) rapid, large scale (15cm x 15cm) patterning of large arrays of devices. Both devices shall consist of direct laser lithography units, imaging and autofocus systems that will allow for precise positioning and stitching of multiple lithographic write fields and overlays. The table-top device will be operated within an ISO-4 area of a clean room, while the stand-alone device should be incorporated within an environmental chamber with a filter system providing a stable environment for the system. The system shall be equipped with all components necessary for operation, including controllers, an acoustic/vibration isolation enclosure (if necessary), computer and software, scanning optics. Freight, warranty, installation, and training costs shall be included in the final total.
Additional specific performance metrics of the two systems can be found later in this tender and separately in the detailed technical description document (downloaded from the same URL on www.evergabe.de)
Abschnitt VI: Weitere Angaben
Abschnitt VII: Änderungen