PVD Cluster - PR21040-2480-W Referenznummer der Bekanntmachung: PR21040-2480-W
Auftragsbekanntmachung
Lieferauftrag
Abschnitt I: Öffentlicher Auftraggeber
Postanschrift:[gelöscht]
Ort: München
NUTS-Code: DE212 München, Kreisfreie Stadt
Postleitzahl: 80686
Land: Deutschland
E-Mail: [gelöscht]
Internet-Adresse(n):
Hauptadresse: https://vergabe.fraunhofer.de/
Abschnitt II: Gegenstand
PVD Cluster - PR21040-2480-W
PVD Cluster
Fraunhofer IPMS
An der Bartlake 5
01109 Dresden
1pc
The equipment should meet all requirements of this specification and the applicable documents. Any changes or additions to the equipment specification made after purchase must be mutually agreed upon by the vendor and Fraunhofer IPMS
The full system including all subsystems has to be chemically stable and compatible to cleanroom class 6 EN ISO 14644-1. Cleanroom integrity has to be secured. The full system has to comply with the technical general tender specification (TGTS). All cables and connections need to be clearly marked at both ends and at the equipment with reference to the delivered equipment documentation.
Option:
5.1.1 Additional FOUP load ports
5.1.2 Dual handling system
5.1.3 Pre clean chamber
5.1.4 Additional deposition processes
5.1.5 PLD deposition chamber
5.1.6 Evaporation deposition chamber
5.1.7 In situ thickness monitoring
5.1.8 Analytics option
5.1.9 Analytic system
5.1.10 High temperature stage
5.1.11 Extended warranty
5.1.12 Maintenance training
5.1.13 Service contract
5.2.1 Cleaning
5.2.2 Plasma monitoring
5.2.3 UHV upgrade
5.2.4 High temperature stage
5.2.5 Evaporation chamber wall cooling system upgrade
5.2.6 Sputter chamber target movement
5.2.7 Mass spectrometry
5.2.8 Additional sputter deposition processes
5.2.9 Additional PLD deposition processes
5.2.10 Additional evaporation deposition processes
5.2.11 Quenching chamber
5.2.12 Chemical cleaning chamber
5.2.13 Ion beam trimming chamber
5.2.14 Post anneal chamber
5.2.15 CVD deposition chamber
5.2.16 ALD deposition chamber
5.2.17 Film thickness analytics
5.2.18 Additional deposition processes
5.2.19 Further analytics or deposition chambers
5.2.20 System extension
5.1.1 Additional FOUP load ports
5.1.2 Dual handling system
5.1.3 Pre clean chamber
5.1.4 Additional deposition processes
5.1.5 PLD deposition chamber
5.1.6 Evaporation deposition chamber
5.1.7 In situ thickness monitoring
5.1.8 Analytics option
5.1.9 Analytic system
5.1.10 High temperature stage
5.1.11 Extended warranty
5.1.12 Maintenance training
5.1.13 Service contract
5.2.1 Cleaning
5.2.2 Plasma monitoring
5.2.3 UHV upgrade
5.2.4 High temperature stage
5.2.5 Evaporation chamber wall cooling system upgrade
5.2.6 Sputter chamber target movement
5.2.7 Mass spectrometry
5.2.8 Additional sputter deposition processes
5.2.9 Additional PLD deposition processes
5.2.10 Additional evaporation deposition processes
5.2.11 Quenching chamber
5.2.12 Chemical cleaning chamber
5.2.13 Ion beam trimming chamber
5.2.14 Post anneal chamber
5.2.15 CVD deposition chamber
5.2.16 ALD deposition chamber
5.2.17 Film thickness analytics
5.2.18 Additional deposition processes
5.2.19 Further analytics or deposition chambers
5.2.20 System extension
Abschnitt III: Rechtliche, wirtschaftliche, finanzielle und technische Angaben
Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-18046b4cddd-2d671e33959027c7
Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-18046b4cddd-2d671e33959027c7
Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-18046b4cddd-2d671e33959027c7
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
Abschnitt IV: Verfahren
Abschnitt VI: Weitere Angaben
- Request of documents - available at: The award documents can be retrieved exclusively through the award portal of https://www.vergabe.fraunhofer.de/NetServer/. With the tender submission, contenders are also subject to the provisions regarding unsuccessful tenders (§134 GWB [German Act Against Restraints of Competition]). Questions or remarks from the tenderer must be sent, in English only, exclusively via e-mail to the contract point named under No. I.1. As far as relevant, responses to the questions or remarks of the tenderer shall also be sent to all other tenderers. Pursuant to Section 9 Par. 3 S. 2 VgV (German public procurement regulation), the contract notice and the awarded documents are available to you at the German eVergabe with or without registration. Please notice that registration is required for requests to participate, tender submissions and tender questions. We therefore recommend early registration, also in order to receive any tenderer information; you otherwise be at the risk of possible tender exclusion.
Postanschrift:[gelöscht]
Ort: Bonn
Postleitzahl: 53123
Land: Deutschland
A request for review is inadmissible if more than 15 calendar days have passed since the receipt of the notification from the ordering party indicating a lack of willingness to help with the objection (§160 Par. 3 Clause 1 No. 4 GWB [German Act Against Restraints of Competition]). A request for review is additionally inadmissible if the contract has been awarded before the Vergabekammer (procurement review authority) has informed the ordering party of the request for review (§§ 168 Par. 2 Clause 1, 169 Par. 1 GWB). The award of the contract is possible 15 calendar days after the dispatch of the tenderer information pursuant to § 134 Par. 1 GWB. If the information is sent electronically or via fax, this time period is reduced to ten calendar days (§ 134 Par. 2 GWB). The time period begins on the day after the dispatch of the information by the ordering party; the day on which it is received at the concerned tenderer and applicant is not relevant. The admissibility of a request for review furthermore presupposes that a complaint has been made to the ordering party with regard to the asserted procurement violations within 10 days after knowledge was obtained of it (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that are apparent on the basis of the announcement must be made to the ordering party before the expiration of the time period named in the announcement for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB). Complaints regarding violations of procurement rules that do not become apparent until appearing in the award documents must be made to the ordering party no later than by the expiration of the time period for the application or for the tendering (§ 160 Par. 3 Clause 1 No. 1 GWB).
Postanschrift:[gelöscht]
Ort: München
Postleitzahl: 80686
Land: Deutschland
E-Mail: [gelöscht]
Internet-Adresse: https://www.fraunhofer.de