DRIE_CVD Plasmacluster - PR340021-2590-W Referenznummer der Bekanntmachung: PR340021-2590-W
Auftragsbekanntmachung
Lieferauftrag
Abschnitt I: Öffentlicher Auftraggeber
Postanschrift: Hansastraße 27c
Ort: München
NUTS-Code: DE212 München, Kreisfreie Stadt
Postleitzahl: 80686
Land: Deutschland
Kontaktstelle(n): corporate Procurement Scientific Devices
E-Mail:
Internet-Adresse(n):
Hauptadresse: https://vergabe.fraunhofer.de/
Abschnitt II: Gegenstand
DRIE_CVD Plasmacluster - PR340021-2590-W
DRIE_CVD Plasmacluster
IZM
Gustav-Meyer-Allee 25
13355 Berlin
1 pc of DRIE_CVD Plasmacluster with options:
15. Additional hardware for size conversion
18. DRIE and PECVD process modules might handle 200mm wafer
25. The software should have 2 different security levels (password protected) for operation, engineering
27. automated backup for the operating system, tool settings, recipes and data
28. The tools should be supplied with SECS/GEM Interface
29. Remote control option for fast service support
42. The DRIE Module has to be equipped with an Optical Emission Spectroscopy system
43. End Point detection for the switching gas process on SiO2 etch stop layer should be able to work with masks (photoresist), where the opening area can be big (~5%) but also as small as 0,5% of the total wafer area
44. An end point detection in the DRIE module shall be implemented to detect the reveal of Cu filled TSVs, when thinning from the backside is carried out.
45. The DRIE module should be able to detect the wafer thickness during thr process and stop as a defined thickness is reached
46.The RIE module should be equipped with and optical end point detecton system
47. The PECVD Module should be equipped with end point detection system for the chamber clean
95. a warranty of 24 month
15. Additional hardware for size conversion
18. DRIE and PECVD process modules might handle 200mm wafer
25. The software should have 2 different security levels (password protected) for operation, engineering
27. automated backup for the operating system, tool settings, recipes and data
28. The tools should be supplied with SECS/GEM Interface
29. Remote control option for fast service support
42. The DRIE Module has to be equipped with an Optical Emission Spectroscopy system
43. End Point detection for the switching gas process on SiO2 etch stop layer should be able to work with masks (photoresist), where the opening area can be big (~5%) but also as small as 0,5% of the total wafer area
44. An end point detection in the DRIE module shall be implemented to detect the reveal of Cu filled TSVs, when thinning from the backside is carried out.
45. The DRIE module should be able to detect the wafer thickness during thr process and stop as a defined thickness is reached
46.The RIE module should be equipped with and optical end point detecton system
47. The PECVD Module should be equipped with end point detection system for the chamber clean
95. a warranty of 24 month
Abschnitt III: Rechtliche, wirtschaftliche, finanzielle und technische Angaben
Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-18ab33f568c-39b52e453395ddab
Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-18ab33f568c-39b52e453395ddab
Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-18ab33f568c-39b52e453395ddab
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
Abschnitt IV: Verfahren
Abschnitt VI: Weitere Angaben
Postanschrift: Villemombler Straße 76
Ort: Bonn
Postleitzahl: 53123
Land: Deutschland
Applications for review are not permitted if more than 15 calendar days have passed since receipt of notification from the contracting authority that it is unwilling to redress an objection (section 160 (3) sentence 1 no. 4 of the German Competition Act (Gesetz gegen Wettbewerbsbeschränkungen, GWB)). Additionally, applications for review are not permitted if an award has been made before the public procurement tribunal has informed the contracting authority about the application for review (sections 168 (2) sentence 1 and 169 (1) GWB). Contracts may be awarded 15 calendar days after the tenderer information pursuant to section 134 (1) GWB has been sent. If the information is sent electronically or by fax, the period shall be reduced to ten calendar days (section 134 (2) GWB). The period shall begin on the day after which the contracting authority sends the information; the date of receipt by the tenderer and candidate in question shall be irrelevant. The admissibility of a review application also requires that the applicant notified the contracting authority about the claimed violations of public procurement provisions within ten calendar days of becoming aware of them (section 160 (3) sentence 1 no. 1 GWB). Violations of public procurement provisions which become apparent from the tender notice must be notified to the contracting authority by the end of the time limit for the application or the submission of a tender specified in the notice (section 160 (3) sentence 1 no. 2 GWB). Violations of public procurement provisions which only become apparent from the procurement documents must be notified to the contracting authority by the end of the time limit for the application or the submission of a tender (section 160 (3) sentence 1 no. 3 GWB).
Postanschrift: Hansastraße 27c
Ort: München
Postleitzahl: 80686
Land: Deutschland
E-Mail:
Internet-Adresse: https://www.fraunhofer.de