Wafersaw - PR360290-2480-W k Referenznummer der Bekanntmachung: PR360290-2480-W k
Bekanntmachung vergebener Aufträge
Ergebnisse des Vergabeverfahrens
Lieferauftrag
Abschnitt I: Öffentlicher Auftraggeber
Postanschrift: Hansastraße 27c
Ort: München
NUTS-Code: DE212 München, Kreisfreie Stadt
Postleitzahl: 80686
Land: Deutschland
Kontaktstelle(n): Corporate Procurement - Scientific Equipment
E-Mail:
Internet-Adresse(n):
Hauptadresse: https://vergabe.fraunhofer.de/
Abschnitt II: Gegenstand
Wafersaw - PR360290-2480-W k
Wafersaw
IPMS
Maria-Reiche-Straße 2
1109 Dresden
1 pc of Wafersaw with options: 2.1.12. The tool is equipped with a resize options to reduce Wafers from Ø300mm to Ø150mm with Semi Flat. 2.1.13. The tool is equipped with a resize options to reduce Wafers from Ø200mm to Ø150mm with Semi Flat. 2.1.14. The tool is equipped with a resize options to reduce Wafers from Ø300mm to individual diameters ≥Ø130mm. 2.2.1 Automated blade changing unit BP 2.2.2. Water cleaning/filtering/loop system to reduce water consumption 2.2.3. Implemention of dresser board with measurement of the blade shape for e.g. trapeze shaped blades 2.2.4. The tool provides loading station for 300mm wafer FOUP cassette (SEMI standard) 2.2.5. The tool is equipped with backside alignment. 2.9.1. A complete listing with quotes for all necessary auxiliary equipment to operate the tool 2.9.2. Set of consumable parts (lamps, o-rings, valves, etc.) to cover the warranty period 2.9.3. Signal light tower 2.9.4. Accoustic alarm signals (e.g. process finished) 2.10.12 As an option, the tool has to be controllable with SECS-GEM commands. Alternatively, a proprietary but completely documented communication interface has to be provided.
2.1.12. The tool is equipped with a resize options to reduce Wafers from Ø300mm to Ø150mm with Semi Flat. 2.1.13. The tool is equipped with a resize options to reduce Wafers from Ø200mm to Ø150mm with Semi Flat. 2.1.14. The tool is equipped with a resize options to reduce Wafers from Ø300mm to individual diameters ≥Ø130mm. 2.2.1 Automated blade changing unit BP 2.2.2. Water cleaning/filtering/loop system to reduce water consumption 2.2.3. Implemention of dresser board with measurement of the blade shape for e.g. trapeze shaped blades 2.2.4. The tool provides loading station for 300mm wafer FOUP cassette (SEMI standard) 2.2.5. The tool is equipped with backside alignment. 2.9.1. A complete listing with quotes for all necessary auxiliary equipment to operate the tool 2.9.2. Set of consumable parts (lamps, o-rings, valves, etc.) to cover the warranty period 2.9.3. Signal light tower 2.9.4. Accoustic alarm signals (e.g. process finished) 2.10.12 As an option, the tool has to be controllable with SECS-GEM commands. Alternatively, a proprietary but completely documented communication interface has to be provided.
Abschnitt IV: Verfahren
Abschnitt V: Auftragsvergabe
Abschnitt VI: Weitere Angaben
Postanschrift: Villemombler Straße 76
Ort: Bonn
Postleitzahl: 53123
Land: Deutschland
Postanschrift: Hansastraße 27c
Ort: München
Postleitzahl: 80686
Land: Deutschland
E-Mail:
Internet-Adresse: https://www.fraunhofer.de