Atomic Force Microscope (AFM) - PR383974-2480-W Referenznummer der Bekanntmachung: PR383974-2480-W
Auftragsbekanntmachung
Lieferauftrag
Abschnitt I: Öffentlicher Auftraggeber
Postanschrift:[gelöscht]
Ort: München
NUTS-Code: DE212 München, Kreisfreie Stadt
Postleitzahl: 80686
Land: Deutschland
Kontaktstelle(n):[gelöscht]
E-Mail: [gelöscht]
Internet-Adresse(n):
Hauptadresse: https://vergabe.fraunhofer.de/
Abschnitt II: Gegenstand
Atomic Force Microscope (AFM) - PR383974-2480-W
Atomic Force Microscope (AFM)
Fraunhofer IPMS
Maria-Reiche-Str. 2
01109 Dresden
Deutschland
We need a 200mm integrated AFM. Target applications are automated step height analysis (section and depth methode) and roughness measurement for Rq ~ 0,1nm as well as profiler measurements for CMP process tuning reason.
This specification describes the requirements for a process tool to be used for wafer fabrication at the FRAUNHOFER IPMS. The systems will be used for the processing of MEMS wafers in a CMOS compatible cleanroom class 10 (approximately class 4 EN ISO 14644-1) production environment.
Abschnitt III: Rechtliche, wirtschaftliche, finanzielle und technische Angaben
Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-1881f0229de-24786795f5b59d88
Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-1881f0229de-24786795f5b59d88
Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-1881f0229de-24786795f5b59d88
In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.
Abschnitt IV: Verfahren
Abschnitt VI: Weitere Angaben
Postanschrift:[gelöscht]
Ort: Bonn
Postleitzahl: 53123
Land: Deutschland
Applications for review are not permitted if more than 15 calendar days have passed since receipt of notification from the contracting authority that it is unwilling to redress an objection (section 160 (3) sentence 1 no. 4 of the German Competition Act (Gesetz gegen Wettbewerbsbeschränkungen, GWB)). Additionally, applications for review are not permitted if an award has been made before the public procurement tribunal has informed the contracting authority about the application for review (sections 168 (2) sentence 1 and 169 (1) GWB). Contracts may be awarded 15 calendar days after the tenderer information pursuant to section 134 (1) GWB has been sent. If the information is sent electronically or by fax, the period shall be reduced to ten calendar days (section 134 (2) GWB). The period shall begin on the day after which the contracting authority sends the information; the date of receipt by the tenderer and candidate in question shall be irrelevant. The admissibility of a review application also requires that the applicant notified the contracting authority about the claimed violations of public procurement provisions within ten calendar days of becoming aware of them (section 160 (3) sentence 1 no. 1 GWB). Violations of public procurement provisions which become apparent from the tender notice must be notified to the contracting authority by the end of the time limit for the application or the submission of a tender specified in the notice (section 160 (3) sentence 1 no. 2 GWB). Violations of public procurement provisions which only become apparent from the procurement documents must be notified to the contracting authority by the end of the time limit for the application or the submission of a tender (section 160 (3) sentence 1 no. 3 GWB).
Postanschrift:[gelöscht]
Ort: München
Postleitzahl: 80686
Land: Deutschland
E-Mail: [gelöscht]
Internet-Adresse: https://www.fraunhofer.de